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Photonic MEMS inertial sensors: challenges and opportunities

August 30, 2023 @ 11:45 am - 1:00 pm

Significant enhancements in inertial sensor performance can be obtained by combining high volume compatible mechanical structures from the micro-electro-mechanical systems (MEMS) industry with silicon photonic microresonators. Although noise floors 100-1,000x lower than typical consumer grade MEMS accelerometer and gyroscopes can be achieved, new challenges arise with integration of light sources including requirements on driving and controlling photonic elements. In this talk I will give an overview of Zero Point Motion’s approach to combining photonic integrated circuit (PIC) microresonators with MEMS. I outline how chipscale devices like LIDAR and optical transceivers approach the integration challenge, new developments in ASIC design to aid control, and how Zero Point Motion is adapting these methods for the inertial sensing market.
Speaker(s): Dr. Ying Lia Li,
11:45am – Noon: Check-In & Announcements
Noon – 12:45pm: Invited Talk
12:45pm – 1pm: Questions & Answers
Virtual: https://events.vtools.ieee.org/m/369097


August 30, 2023
11:45 am - 1:00 pm


Virtual: https://events.vtools.ieee.org/m/369097